Micromechanical Comb Actuators with Low Driving Voltage
1992
Details
Title
Micromechanical Comb Actuators with Low Driving Voltage
Author(s)
Jaecklin, V. P. ; Linder, C. ; de Rooij, N. F. ; Moret, J. M.
Published in
Technical Digest VDI/VDE Actuator'92
Pages
40-45
Date
1992
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12