Micromechanical Comb Actuators with Low Driving Voltage
1992
Details
Title
Micromechanical Comb Actuators with Low Driving Voltage
Author(s)
Jaecklin, V. P. ; Linder, C. ; de Rooij, N. F. ; Moret, J.-M.
Published in
Journal of Micromechanics and Microengineering
Volume
2
Pages
250-255
Date
1992
Note
62
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12