A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
2008
Details
Title
A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
Author(s)
Isarakorn, D. ; Briand, D. ; Gariglio, S. ; Sambri, A. ; Stucki, N. ; Triscone, J.-M. ; Guy, F. ; Reiner, J. W. ; Ahn, C. H. ; de Rooij, N. F.
Published in
PowerMEMS 2008
Pages
269-272
Conference
PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008
Date
2008
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12