Establishment of a technology platform for epitaxial piezoelectric MEMS
2008
Details
Title
Establishment of a technology platform for epitaxial piezoelectric MEMS
Author(s)
Isarakorn, D. ; Briand, D. ; Gariglio, S. ; Sambri, A. ; Stucki, N. ; Triscone, J.-M. ; Guy, F. ; Baek, S.-H. ; Eom, C.-B. ; Reiner, J. W. ; Ahn, C. H. ; de Rooij, N. F.
Published in
Proceedings of 22nd International Conference Eurosensors
Volume
1
Pages
819-822
Conference
Eurosensors XXII, Dresden, Germany, September 7-10, 2008
Date
2008
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12