Self-Sharpening Tip Integrated on Micro Cantilevers with Self-Exciting Piezoelectric Sensor for Parallel Atomic Force Microscopy
1997
Details
Title
Self-Sharpening Tip Integrated on Micro Cantilevers with Self-Exciting Piezoelectric Sensor for Parallel Atomic Force Microscopy
Author(s)
Indermühle, P.-F. ; Schürmann, G. ; Racine, G.-A. ; de Rooij, N. F.
Published in
Applied Physics Letters
Volume
70
Issue
17
Pages
2318-2320
Date
1997
Note
159
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12