A novel pneumatic actuator system realised by microelectro-discharge machining
1998
Details
Title
A novel pneumatic actuator system realised by microelectro-discharge machining
Author(s)
Hirata, T. ; Akashi, T. ; Bertholds, A. ; Gruber, H. P. ; Schmid, A. ; Grétillat, M.-A. ; Guenat, O. ; de Rooij, N. F.
Published in
MEMS '98 11th Annual International Workshop on Micro Electro Mechanical Systems
Pages
160-165
Date
1998
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12