Microstructuring of Silicon by Electro-Discharge Machining (EDM) - part II: Applications
1996
Details
Title
Microstructuring of Silicon by Electro-Discharge Machining (EDM) - part II: Applications
Author(s)
Heeren, P. H. ; Beuret, C. ; Larsson, O. ; Bertholds, A. ; Reynaerts, D.
Published in
Eurosensors X - The 10th European Conference on Solid-State Transducers
Pages
255-258
Date
1996
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12