Fabrication of Nanochannels Systems by Surface Micromachining
2004
Details
Title
Fabrication of Nanochannels Systems by Surface Micromachining
Author(s)
Han, A. ; de Rooij, N. F. ; Staufer, U.
Published in
Proceedings of NanoTech 2004
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12