Fabrication of Nanochannels Using Photolithography and Partial Etching of Sacrificial Layer
2004
Details
Title
Fabrication of Nanochannels Using Photolithography and Partial Etching of Sacrificial Layer
Author(s)
Han, A. ; Mondin, G. ; Hegelbach, N. G. ; de Rooij, N. F. ; Staufer, U.
Published in
Micro Total Analysis Systems TAS 2004
Pages
309-311
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12