A pneumatic air table realized by microelectro-discharge machining
1998
Details
Title
A pneumatic air table realized by microelectro-discharge machining
Author(s)
Guenat, O. ; Hirata, T. ; Akashi, T. ; Grétillat, M.-A. ; de Rooij, N. F.
Published in
Journal of Microelectromechanical Systems
Volume
7
Issue
4
Pages
380-386
Date
1998
Note
181
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12