Nonlinear Electromechanical Behavior of an Electrostatic Microrelay
1997
Details
Title
Nonlinear Electromechanical Behavior of an Electrostatic Microrelay
Author(s)
Grétillat, M.-A. ; Yang, Y.-J. ; Hung, E. S. ; Rabinovich, V. ; Ananthasuresh, G.-K. ; de Rooij, N. F. ; Senturia, S. D.
Published in
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Volume
2
Pages
1141-1144
Date
1997
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12