Electrostatic Polysilicon Microrelays Integrated with MOSFETs
1994
Details
Title
Electrostatic Polysilicon Microrelays Integrated with MOSFETs
Author(s)
Grétillat, M.-A. ; Thiébaud, P. ; de Rooij, N. F. ; Linder, C.
Published in
IEEE Micro Electro Mechanical Systems
Pages
97-101
Date
1994
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12