Integrated Circuit Compatible Electrostatic Polysilicon Microrelays
1995
Details
Title
Integrated Circuit Compatible Electrostatic Polysilicon Microrelays
Author(s)
Grétillat, M.-A. ; Thiébaud, P. ; Linder, C. ; de Rooij, N. F.
Published in
Journal of Micromechanics and Microengineering
Volume
5
Pages
156-160
Date
1995
Note
125
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12