IC Compatible Electrostatic Polysilicon Microrelays
1994
Details
Title
IC Compatible Electrostatic Polysilicon Microrelays
Author(s)
Grétillat, M.-A. ; Thiébaud, P. ; Linder, C. ; de Rooij, N. F.
Published in
MME'94 Micromechanics Europe Workshop
Pages
137-140
Date
1994
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12