Multilayer Polysilicon Resonators Including Shielding for Excitation and Detection
1993
Details
Title
Multilayer Polysilicon Resonators Including Shielding for Excitation and Detection
Author(s)
Grétillat, M.-A. ; Linder, C. ; de Rooij, N. F.
Published in
Transducers'93 the 7th Internat. Conf. on Solid-State Sensors and Actuators
Pages
292-295
Date
1993
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12