Multilayer Polysilicon Resonators Including Shielding for Excitation and Detection


Published in:
Transducers'93 the 7th Internat. Conf. on Solid-State Sensors and Actuators, 292-295
Year:
1993
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)