All-photoplastic, soft cantilever cassette probe for scanning force microscopy

The fabrication and application of photoplastic scanning force microscopy (SFM) probes has been demonstrated. Simple molding and replication techniques, inexpensive photoplastic material, reusable molds and several layers per probe make it a very attractive for fabricating low-cost photoplastic SFM probes. The good homogeneity of the cantilevers within a cassette and among cassettes over a 4 in. wafer coupled with an appropriate holder provides ease of operation.


Published in:
Journal of Vacuum Science Technology, B18, 2, 617-620
Year:
2000
Note:
237
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


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