Using microtechnology to get to nanotechnology
2004
Details
Title
Using microtechnology to get to nanotechnology
Author(s)
Gautsch, S. ; de Rooij, N. F. ; Staufer, U. ; Akiyama, T. ; Aeschimann, L.
Published in
Machine Design
Pages
65
Date
2004
Note
321
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12