MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008
Details
Title
MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
Author(s)
Gariglio, S. ; Stucki, N. ; Triscone, J.-M. ; Isarakorn, D. ; Briand, D. ; de Rooij, N. F. ; Baek, S.-H. ; Eom, C.-B. ; Reiner, J. W. ; Ahn, C. H.
Published in
Workshop on Oxide Electronics 15
Date
2008
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12