A 1.5-V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotor
1996
Details
Title
A 1.5-V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotor
Author(s)
Favrat, P. ; Paratte, L. ; Ballan, H. ; Declercq, M. J. ; de Rooij, N. F.
Published in
MEMS'96 IEEE 9th Annual Internat. Workshop on Micro Electro Mechanical Systems
Pages
25-31
Date
1996
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12