A 1.5-V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotor


Published in:
MEMS'96 IEEE 9th Annual Internat. Workshop on Micro Electro Mechanical Systems, 25-31
Year:
1996
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


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