Reciprocating Silicon Microtribometer
2003
Details
Title
Reciprocating Silicon Microtribometer
Author(s)
Dubois, P. ; von Gunten, S. ; Enzler, A. ; Lippuner, U. ; Dommann, A. ; de Rooij, N. F.
Published in
Microtribology - Tribology of Microsystems
Date
2003
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12