High-speed electrostatic gas microvalve switching behavior
2001
Details
Title
High-speed electrostatic gas microvalve switching behavior
Author(s)
Dubois, P. ; Guldimann, B. ; de Rooij, N. F.
Published in
Microfluidics and BioMEMS
Series
4560, SPIE Proceedings
Pages
217-226
Conference
Micromachining and Microfabrication, 21-25 October 2001, San Francisco, CA, United States
Date
2001
Note
263
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12