000137664 001__ 137664
000137664 005__ 20180913055244.0
000137664 037__ $$aARTICLE
000137664 245__ $$aHigh-speed electrostatic gas microvalve switching behavior
000137664 260__ $$c2001
000137664 269__ $$a2001
000137664 336__ $$aJournal Articles
000137664 500__ $$a263
000137664 700__ $$0240308$$aDubois, P.$$g168661
000137664 700__ $$aGuldimann, B.
000137664 700__ $$0243301$$ade Rooij, N. F.$$g104887
000137664 773__ $$j4560$$q217-226$$tMicrofluidics and BioMEMS
000137664 909C0 $$0252173$$pSAMLAB$$xU10329
000137664 909CO $$ooai:infoscience.tind.io:137664$$particle
000137664 937__ $$aSAMLAB-ARTICLE-2001-009
000137664 973__ $$aOTHER$$rREVIEWED$$sPUBLISHED
000137664 980__ $$aARTICLE