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Electrostatically actuated gas microvalve based on a Ta-Si-N membrane

Dubois, P. ; Guldimann, B. ; Grétillat, M.-A. ; de Rooij, N. F.

Published in:
14th IEEE Internat. Conf. On Micro Electro Mechanical Systems - Technical Digest, 535-538
Year:
2001
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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