Infoscience

Conference paper

Electrostatically actuated gas microvalve based on a Ta-Si-N membrane

Dubois, P.; Guldimann, B.; Grétillat, M.-A.; de Rooij, N. F.
  • Published in: 14th IEEE Internat. Conf. On Micro Electro Mechanical Systems - Technical Digest, p. 535-538
  • Publication date: 2001

    Reference

    • SAMLAB-CONF-2001-011

    Record created on 2009-05-12, modified on 2016-08-08

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