Electrostatically actuated gas microvalve based on a Ta-Si-N membrane
2001
Details
Title
Electrostatically actuated gas microvalve based on a Ta-Si-N membrane
Author(s)
Dubois, P. ; Guldimann, B. ; Grétillat, M.-A. ; de Rooij, N. F.
Published in
14th IEEE Internat. Conf. On Micro Electro Mechanical Systems - Technical Digest
Pages
535-538
Date
2001
Laboratories
SAMLAB