Electrostatically actuated gas microvalve based on a Ta-Si-N membrane
Dubois, P.; Guldimann, B.; Grétillat, M.-A.; de Rooij, N. F.
2001

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Title Electrostatically actuated gas microvalve based on a Ta-Si-N membrane
Author(s) Dubois, P. ; Guldimann, B. ; Grétillat, M.-A. ; de Rooij, N. F.
Published in 14th IEEE Internat. Conf. On Micro Electro Mechanical Systems - Technical Digest
Pages 535-538
Date 2001
Laboratories SAMLAB
Record Appears in Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
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