Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering
2006
Details
Title
Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering
Author(s)
Le Dréo, H. ; Banakh, O. ; Keppner, H. ; Steinmann, P.-A. ; Briand, D. ; de Rooij, N. F.
Published in
ICMCTF International Conference on Metallurgical Coatings and Thin Films
Pages
91
Date
2006
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12