Electron-Beam Microcolumn Fabrication and Testing
1996
Details
Title
Electron-Beam Microcolumn Fabrication and Testing
Author(s)
Despont, M. ; Staufer, U. ; Stebler, C. ; Gross, H. ; Vettiger, P.
Published in
Microelectronic Engineering
Volume
30
Pages
69-72
Date
1996
Note
149
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12