Fabrication of an Integrated Silicon-Based Lens for Low-Energy Miniaturized Electron Columns
1996
Details
Title
Fabrication of an Integrated Silicon-Based Lens for Low-Energy Miniaturized Electron Columns
Author(s)
Despont, M. ; Beljakovic, G. ; Stebler, C. ; Staufer, U. ; Vettiger, P. ; de Rooij, N. F.
Published in
Japanese Journal of Applied Physics
Volume
35
Issue
12B
Pages
6641-6647
Date
1996
Note
148
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12