Fabrication of an Integrated Silicon-Based Lens for Low-Energy Miniaturized Electron Columns


Published in:
Japanese J. Appl. Phys., 35, 12B, 6641-6647
Year:
1996
Note:
148
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)