Fabrication Process of High Aspect Ratio Elastic Structures for Piezoelectric Motor Applications
1997
Details
Title
Fabrication Process of High Aspect Ratio Elastic Structures for Piezoelectric Motor Applications
Author(s)
Dellmann, L. ; Roth, S. ; Beuret, C. ; Racine, G.-A. ; Lorenz, H. ; Despont, M. ; Renaud, P. ; Vettiger, P. ; de Rooij, N. F.
Published in
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Volume
1
Pages
641-644
Date
1997
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12