Micromachined piezoelectric elastic force motor (EFM)
2000
Details
Title
Micromachined piezoelectric elastic force motor (EFM)
Author(s)
Dellmann, L. ; Racine, G.-A. ; de Rooij, N. F.
Published in
MEMS '00 13th Annual Internat. Conf. on Micro Electro Mechanical Systems
Pages
52-55
Date
2000
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12