Infoscience

Conference paper

Micromachined piezoelectric elastic force motor (EFM)

Dellmann, L.; Racine, G.-A.; de Rooij, N. F.
  • Published in: MEMS '00 13th Annual Internat. Conf. on Micro Electro Mechanical Systems, p. 52-55
  • Publication date: 2000

    Reference

    • SAMLAB-CONF-2000-010

    Record created on 2009-05-12, modified on 2016-08-08

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