Micromachined piezoelectric elastic force motor (EFM)


Published in:
MEMS '00 13th Annual Internat. Conf. on Micro Electro Mechanical Systems, 52-55
Year:
2000
Laboratories:




 Record created 2009-05-12, last modified 2018-09-13


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)