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> Micromachined piezoelectric elastic force motor (EFM)
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Micromachined piezoelectric elastic force motor (EFM)
Dellmann, L.
;
Racine, G.-A.
;
de Rooij, N. F.
Published in:
MEMS '00 13th Annual Internat. Conf. on Micro Electro Mechanical Systems, 52-55
Year:
2000
Laboratories:
SAMLAB
Record appears in:
Scientific production and competences
>
Archives
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STI - School of Engineering
>
SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
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Record created 2009-05-12, last modified 2018-03-17
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MARC
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DC
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EndNote
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NLM
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RefWorks