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Micromachined piezoelectric elastic force motor (EFM)

Dellmann, L. ; Racine, G.-A. ; de Rooij, N. F.

Published in:
MEMS '00 13th Annual Internat. Conf. on Micro Electro Mechanical Systems, 52-55
Year:
2000
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-09-13


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