Microsystems for diverse applications using recently developed microfabrication techniques
2000
Details
Title
Microsystems for diverse applications using recently developed microfabrication techniques
Author(s)
Dellmann, L. ; Akiyama, T. ; Briand, D. ; Gautsch, S. ; Guenat, O. ; Guldimann, B. ; Luginbuhl, Ph. ; Marxer, C. ; Staufer, U. ; van der Schoot, B. ; de Rooij, N. F.
Published in
MOEMS and Miniaturized Systems
Pages
16-27
Date
2000
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12