MEMS Hotplates with TiN as a Heater Material
2005
Details
Title
MEMS Hotplates with TiN as a Heater Material
Author(s)
Cremer, J. F. ; Briand, D. ; van der Vlist, W. ; de Boer, C. ; de Rooij, N. F. ; Zandbergen, H. W. ; Sarro, P. M.
Published in
The 4th IEEE Conference on Sensors 2005
Pages
330-333
Date
2005
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12