Details
Title
Electromechanical Polysilicon Structres and Micromachining.
Author(s)
LINDER, Christian
Advisor(s)
Date
1993
Publisher
Université de Neuchâtel
Note
Jury: A. Shah, H. Baltès (ETHZ), W. Trimmer (Princeton Uni).
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12