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Robust High Performance Planar Inductors on Glass Substrate

Carazzetti, P. ; Dubois, M.-A. ; Dubois, P. ; de Rooij, N. F.

Published in:
15th MicroMechanics Europe Workshop, 233-236
Year:
2004
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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