Realization of a Mesa Array in (001) Oriented Silicon Wafers for Tactile Sensing Applications
1986
Details
Title
Realization of a Mesa Array in (001) Oriented Silicon Wafers for Tactile Sensing Applications
Author(s)
Buser, R. ; Stauffer, B. ; de Rooij, N. F.
Published in
Extended Abstracts of the Fall Meeting of the Electrochemical Society
Pages
879-880
Date
1986
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12