Details
Title
ASEP : a CAD Program for Silicon Anisotropic Etching
Author(s)
Buser, R. ; de Rooij, N. F.
Published in
Sensors and Actuators A
Volume
28
Pages
71-78
Date
1991
Note
52
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12