Details
Title
Capacitively Activated Torsional High-Q Resonator
Author(s)
Buser, R. ; de Rooij, N. F.
Published in
IEEE Micro Electro Mechanical Systems Conference
Pages
132-135
Date
1990
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12