Details
Title
CAD for Silicon Anisotropic Etching
Author(s)
Buser, R. ; de Rooij, N. F.
Published in
IEEE Micro Electro Mechanical Systems Conference
Pages
111-112
Date
1990
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12