Infoscience

Conference paper

CAD for Silicon Anisotropic Etching

Buser, R.; de Rooij, N. F.
  • Published in: IEEE Micro Electro Mechanical Systems Conference, p. 111-112
  • Publication date: 1990

    Reference

    • SAMLAB-CONF-1990-003

    Record created on 2009-05-12, modified on 2016-08-08

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