From the Mask Layout to the Performance of a Device : A Complete CAD System for Micromachined Monocrystalline Silicon Structure
1990
Details
Title
From the Mask Layout to the Performance of a Device : A Complete CAD System for Micromachined Monocrystalline Silicon Structure
Author(s)
Buser, R. ; de Rooij, N. F.
Published in
MME'90 workshop on Micromachining, Micromechanics and Microsystems
Date
1990
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12