Details
Title
Very High Q-Factor Resonators in Monocrystalline Silicon
Author(s)
Buser, R. ; de Rooij, N. F.
Published in
Sensors and Actuators A
Volume
21-23
Pages
323-327
Date
1990
Note
42
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12