Infoscience

Journal article

Very High Q-Factor Resonators in Monocrystalline Silicon

Buser, R.; de Rooij, N. F.
  • Published in: Sensors and Actuators, vol. A21-A23, p. 323-327
  • Publication date: 1990

    Note:

    42

    Reference

    • SAMLAB-ARTICLE-1990-002

    Record created on 2009-05-12, modified on 2016-08-08

Fulltext

  • There is no available fulltext. Please contact the lab or the authors.

Related material

Contacts

EPFL authors