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Very High Q-Factor Resonators in Monocrystalline Silicon

Buser, R. ; de Rooij, N. F.

Published in:
Sensors and Actuators, A21-A23, 323-327
Year:
1990
Note:
42
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published



 Record created 2009-05-12, last modified 2018-09-13


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