Very High Q-Factor Resonators in Monocrystalline Silicon


Published in:
Sensors and Actuators, A21-A23, 323-327
Year:
1990
Note:
42
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)