Details
Title
Resonant Silicon Structures
Author(s)
Buser, R. ; de Rooij, N. F.
Published in
Sensors and Actuators
Volume
17
Issue
1/2
Pages
145-153
Date
1989
Note
31
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12