Integration of the Anisotropic-Silicon-Etching-Program ASEPtm within the CAEMEMStm CAD/CAE Framework
1992
Details
Title
Integration of the Anisotropic-Silicon-Etching-Program ASEPtm within the CAEMEMStm CAD/CAE Framework
Author(s)
Buser, R. ; Crary, S. B. ; Juma, O. S.
Published in
MEMS'92
Pages
133-138
Date
1992
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12