Micromachined Silicon Cantilevers and Tips for Bidirectional Force Microscopy
1991
Details
Title
Micromachined Silicon Cantilevers and Tips for Bidirectional Force Microscopy
Author(s)
Buser, R. ; Brugger, J. ; Linder, C. ; de Rooij, N. F.
Published in
Transducers'91 the 6th Internat. Conf. Solid-State Sensors and Actuators
Pages
249-252
Date
1991
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12