Details
Title
Monocrystalline Silicon Resonators
Author(s)
Buser, R.
Published in
AMA/SVS Seminar Mikromechanik
Pages
193
Date
1989
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12