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conference paper
Fabrication of an Overhanging XY-Microactuator with Integrated Tip for Scanned Surface Profiling
1993
Transducers'93 the 7th Internat. Conf. on Solid-State Sensors and Actuators
Type
conference paper
Authors
Publication date
1993
Published in
Transducers'93 the 7th Internat. Conf. on Solid-State Sensors and Actuators
Start page
1044
End page
1047
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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