Infoscience

Conference paper

Fabrication of an Overhanging XY-Microactuator with Integrated Tip for Scanned Surface Profiling

    Reference

    • SAMLAB-CONF-1993-003

    Record created on 2009-05-12, modified on 2016-08-08

Fulltext

  • There is no available fulltext. Please contact the lab or the authors.

Related material