Fabrication of an Overhanging XY-Microactuator with Integrated Tip for Scanned Surface Profiling


Published in:
Transducers'93 the 7th Internat. Conf. on Solid-State Sensors and Actuators, 1044-1047
Year:
1993
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


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