Fabrication of an Overhanging XY-Microactuator with Integrated Tip for Scanned Surface Profiling
1993
Details
Title
Fabrication of an Overhanging XY-Microactuator with Integrated Tip for Scanned Surface Profiling
Author(s)
Brugger, J. ; Jaecklin, V. P. ; Indermühle, P.-F. ; Linder, C. ; de Rooij, N. F.
Published in
Transducers'93 the 7th Internat. Conf. on Solid-State Sensors and Actuators
Pages
1044-1047
Date
1993
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12