000137550 001__ 137550
000137550 005__ 20180913055242.0
000137550 037__ $$aARTICLE
000137550 245__ $$aMicrosystems Research and Development at IMT Neuchatel - Scanning Probe Microsystem for Nanotechnology
000137550 260__ $$c1993
000137550 269__ $$a1993
000137550 336__ $$aJournal Articles
000137550 500__ $$a94
000137550 700__ $$aBrugger, J.
000137550 700__ $$aJaecklin, V. P.
000137550 700__ $$aIndermühle, P.-F.
000137550 700__ $$aLinder, C.
000137550 773__ $$j6$$k1$$q105$$tJournal of Micromachine Society
000137550 909C0 $$0252173$$pSAMLAB$$xU10329
000137550 909CO $$ooai:infoscience.tind.io:137550$$particle
000137550 937__ $$aSAMLAB-ARTICLE-1993-005
000137550 973__ $$aOTHER$$rREVIEWED$$sPUBLISHED
000137550 980__ $$aARTICLE